| 发明名称 | Ceramic member and member for semiconductor manufacturing equipment | ||
| 摘要 | A member 20 for semiconductor manufacturing equipment includes a base portion 22 and a ceramic member 30 formed on the base portion 22. The ceramic member 30 of the present invention includes a ceramic base 32 containing at least one of magnesium oxide, a magnesium oxide solid solution in which a predetermined component is dissolved in magnesium oxide, and zirconium oxide; and an electrode 34 which is arranged on part of the ceramic base 32 and which contains a ruthenium-aluminum alloy as an electrode component. The ceramic member 30 is a plate-like member and has a structure in which the electrode 34 is embedded therein. The electrode 34 is connected to a feeding member 26 inserted from the underside of the ceramic member 30. Electric power is supplied from the feeding member 26. | ||
| 申请公布号 | US9177847(B2) | 申请公布日期 | 2015.11.03 |
| 申请号 | US201414195125 | 申请日期 | 2014.03.03 |
| 申请人 | NGK Insulators, Ltd. | 发明人 | Watanabe Atsushi;Nishimura Noboru |
| 分类号 | H01L21/683;H01T23/00 | 主分类号 | H01L21/683 |
| 代理机构 | Burr & Brown, PLLC | 代理人 | Burr & Brown, PLLC |
| 主权项 | 1. A ceramic member comprising: a ceramic base containing at least one of magnesium oxide, a magnesium oxide solid solution in which a predetermined component is dissolved in magnesium oxide, and zirconium oxide; and an electrode arranged on part of the ceramic base, the electrode containing a ruthenium-aluminum alloy serving as an electrode component. | ||
| 地址 | Nagoya JP | ||