发明名称 Magnetoresistive element using specific underlayer material
摘要 According to one embodiment, a magnetoresistive element includes a recording layer having magnetic anisotropy perpendicular to a film surface and having a variable magnetization direction, a reference layer having magnetic anisotropy perpendicular to a film surface and having an invariable magnetization direction, an intermediate layer provided between the recording layer and the reference layer, and a underlayer containing AlTiN and provided on an opposite side of a surface of the recording layer on which the intermediate layer is provided.
申请公布号 US9178133(B2) 申请公布日期 2015.11.03
申请号 US201414160419 申请日期 2014.01.21
申请人 Kabushiki Kaisha Toshiba 发明人 Kitagawa Eiji;Kai Tadashi;Yoda Hiroaki
分类号 H01L43/10;H01F10/08;G11C11/16;H01L43/08;H01F10/30;H01F10/32;G01R33/09 主分类号 H01L43/10
代理机构 Knobbe, Martens, Olson & Bear, LLP 代理人 Knobbe, Martens, Olson & Bear, LLP
主权项 1. A magnetoresistive element comprising: a recording layer having magnetic anisotropy perpendicular to a film surface and having a variable magnetization direction; a reference layer having magnetic anisotropy perpendicular to a film surface and having an invariable magnetization direction; an intermediate layer provided between the recording layer and the reference layer; and an underlayer containing AlTiN and provided on an opposite side of a surface of the recording layer on which the intermediate layer is provided, wherein the underlayer comprises an amorphous structure, and contains one element selected from the group consisting of O, B and C.
地址 Tokyo JP
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