SUBSTRATE TEMPERATURE STABILIZING DEVICE AND SUBSTRATE TEMPERATURE STABILIZING METHOD

摘要

According to the present invention, disclosed are a device for stabilizing the temperature of a substrate, and a method thereof. The disclosed device for stabilizing the temperature of a substrate comprises a measuring unit which measures a calculation temperature of chemical liquid contacting a substrate or an interface contacting the substrate and the chemical liquid. The measuring unit comprises: an emissivity setting unit which receives emissivity of the chemical liquid or the interface when the chemical liquid is supplied to the substrate; a radiant energy input unit which receives radiant energy emitted from the chemical liquid or the interface; and a calculation unit which calculates a calculation temperature of the chemical liquid or the interface through the emissivity and the radiant energy.