发明名称 Vertical nanowire transistor for input/output structure
摘要 Systems for protecting a circuit from an electrostatic discharge (ESD) voltage are provided. An input terminal receives an input signal. An ESD protection circuit receives the input signal from the input terminal. The ESD protection circuit includes one or more vertical nanowire field effect transistors (FETs). Each of the one or more vertical nanowire FETs includes a well of a first conductivity type. Each of the one or more vertical nanowire FETs also includes a nanowire having i) a source region at a first end of the nanowire, and ii) a drain region at a second end of the nanowire that is opposite the first end. The source region further includes a portion formed in the well, where the source region and the drain region are of a second conductivity type. A gate region surrounds a portion of the nanowire and is separated from the drain region by a distance.
申请公布号 US9177924(B2) 申请公布日期 2015.11.03
申请号 US201314132076 申请日期 2013.12.18
申请人 Taiwan Semiconductor Manufacturing Company Limited 发明人 Colinge Jean-Pierre;Guo Ta-Pen;Diaz Carlos H.
分类号 H01L23/60 主分类号 H01L23/60
代理机构 Jones Day 代理人 Jones Day
主权项 1. A system for protecting a circuit from an electrostatic discharge (ESD) voltage, the system comprising: an input terminal for receiving an input signal; an ESD protection circuit configured to receive the input signal from the input terminal, the ESD protection circuit including one or more vertical nanowire field effect transistors (FETs), wherein each of the one or more vertical nanowire FETs includes: a well of a first conductivity type that is formed in a semiconductor substrate,a nanowire having i) a source region at a first end of the nanowire, and ii) a drain region at a second end of the nanowire that is opposite the first end, the source region further including a portion formed in the well, wherein the source region and the drain region are of a second conductivity type such that a PN junction is formed between the well and the portion of the source region formed in the well, anda gate region surrounding a portion of the nanowire, wherein the gate region is separated from the drain region by a first distance, the separation of the gate region and the drain region providing a resistance in series between the drain region and the source region; and an output terminal configured to receive the input signal from the ESD protection circuit, wherein an ESD-induced voltage in the input signal is attenuated by the resistance and the PN junction.
地址 Hsinchu TW
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