| 发明名称 | Method for producing high purity germane by a continuous or semi-continuous process | ||
| 摘要 | A continuous or semi-continuous process for producing a high purity germane includes (a) preparing a reaction mixture containing hydrogen and crude germane and (b) separating the hydrogen from the crude germane by a pressure swing adsorption process. The pressure swing adsorption process results in a hydrogen-rich product stream and a germane-rich product stream. The method further includes (c) purifying the germane-rich product stream by continuous distillation thereof to remove impurities therefrom and to produce a high purity germane containing less than 0.1 volume percent of impurities. | ||
| 申请公布号 | US9174853(B2) | 申请公布日期 | 2015.11.03 |
| 申请号 | US201414540466 | 申请日期 | 2014.11.13 |
| 申请人 | Gelest Technologies, Inc. | 发明人 | Arkles Barry C.;Timberlake, Jr. George A. |
| 分类号 | H01L21/44;C01G17/00;B01D53/04;B01D53/047;F25J3/08;C01B3/56;C01B6/06 | 主分类号 | H01L21/44 |
| 代理机构 | Panitch Schwarze Belisario & Nadel LLP | 代理人 | Panitch Schwarze Belisario & Nadel LLP |
| 主权项 | 1. A continuous or semi-continuous process for producing a high purity germane containing less than 0.1 volume percent of impurities, the method comprising: (a) preparing a reaction mixture containing hydrogen and crude germane; (b) separating the hydrogen from the crude germane by a pressure swing adsorption process, the pressure swing adsorption process resulting in a hydrogen-rich product stream and a germane-rich product stream; and (c) purifying the germane-rich product stream by continuous distillation thereof to remove impurities therefrom and to produce a high purity germane containing less than 0.1 volume percent of impurities. | ||
| 地址 | Morrisville PA US | ||