Substrate and target plate

摘要

A substrate is provided, which comprises a structured surface including a regular pattern of a plurality of elevated structures that are elevated with respect to a nominal surface of the substrate, wherein at least two dimensions are between 1 nm and 100 μm, the structured surface being configured to stimulate smooth crystallization of microcrystals or to boost hydrophobic properties. A target plate comprising a plurality of substrates is disclosed as well.

主权项

1. A substrate comprising:
a structured surface including a regular pattern of a plurality of elevated structures that are elevated with respect to a nominal surface of the substrate, the structured surface being configured to stimulate crystallization of microcrystals, wherein at least two dimensions of the elevated structures are between 1 nm and 100 μm, a basic unit of the regular pattern includes a first elevated structure which is elongated along a first direction in parallel to the nominal surface and which includes a first cross-section perpendicular to the first direction and the regular pattern further includes a second elevated structure, which is elongated along the first direction and which includes a second cross-section perpendicular to the first direction, such that the second cross-section is smaller than the first cross-section, a height of the first cross-section perpendicular to the nominal surface is different from a height of the second cross-section perpendicular to the nominal surface, in the regular pattern, a first distance between the first elevated structure and the second elevated structure is different from a second distance between the second elevated structure and a next first elevated structure, the first distance being half the second distance so as to stimulate crystallization of the microcrystals, and the first distance and the second distance are determined based on at least one of a size, crystallization form, and shape of the microcrystals.