APPARATUS FOR RECOVERING CLEANING AGENT

摘要

Disclosed is a cleaning agent collecting apparatus. The cleaning agent collecting apparatus of the present invention comprises: a cooling device cooling hydrofluoroether (HFE) in a gaseous state that is collected from a cleaning chamber; and a storage tank where liquid hydrofluoroether discharged from a condensation device is collected. According to the present invention, the cleaning agent collecting apparatus not only inhibits evaporation of hydrofluoroether during a cleaning process but also collects hydrofluoroether evaporated in the course of the cleaning process at the same time, thereby enhancing work efficiency of a cleaning apparatus.