发明名称 System for tomographic imaging using coherent light that has a random phase distribution
摘要 The present invention provides an apparatus for tomographic imaging of an object. The apparatus includes a light unit configured to generate illumination, which comprises coherent light and has random phase distribution in a plane perpendicular to an optical axis, for illuminating an object, a coupler which combines a reference beam and an object beam for an interference, a shifter configured to shift relative phase difference between the object light and the reference coherent light, a detector configured to detect an interference caused by the reference coherent light and object light for the each phase, and a processor configured to calculate an optical propagation based on the detected interference for the each phase.
申请公布号 US9176054(B2) 申请公布日期 2015.11.03
申请号 US201213491322 申请日期 2012.06.07
申请人 Canon Kabushiki Kaisha;THE ARIZONA BOARD OF REGENTS 发明人 Matsubara Isao;Yu Chung-Chieh;Dallas William
分类号 G01B9/02;G01N21/45;G01N21/47 主分类号 G01B9/02
代理机构 Canon USA, Inc. I.P. Division 代理人 Canon USA, Inc. I.P. Division
主权项 1. An apparatus for tomographic imaging of an object comprising: a coherent light source that generates illumination, which comprises coherent light; a separator configured to split the coherent light into a reference light and a illumination light; a shifter configured to adjustably shift a relative phase difference between the illumination light and the reference light, by shifting the phase of the reference light or the illumination light; a spatial phase adjuster configured to adjust the phase of the illumination light such that the illumination light has a random phase distribution in a plane perpendicular to the optical axis; a coupler which combines the reference light and object light, wherein the object light is light from the object which has been illuminated by the illumination light, the reference light and the object light being interfered; a detector configured to detect an interference caused by the reference light and the object light, wherein object light does not go through a phase shift aperture; and a processor configured to calculate a complex amplitude for an optical propagation which reflects influence when the object light is assumed to go through the phase shift aperture based on the detected interference.
地址 Tokyo JP