Method and apparatus for load-locked printing

摘要

The disclosure relates to a method and apparatus for preventing oxidation or contamination during a circuit printing operation. The circuit printing operation can be directed to OLED-type printing. In an exemplary embodiment, the printing process is conducted at a load-locked printer housing having one or more of chambers. Each chamber is partitioned from the other chambers by physical gates or fluidic curtains. A controller coordinates transportation of a substrate through the system and purges the system by timely opening appropriate gates. The controller may also control the printing operation by energizing the print-head at a time when the substrate is positioned substantially thereunder.

主权项

1. A method for depositing an organic material on a substrate, the method comprising the steps of:
receiving the substrate at an inlet chamber; sealing the inlet chamber; providing the inlet chamber with a substantially nitrogen environment; floating the substrate using a gas bearing; directing at least a portion of the substrate to a print-head chamber and, while floating the substrate using a combination of pressure and vacuum, discharging a quantity of the organic material from a discharge nozzle onto the portion of the substrate; directing the substrate to an outlet chamber; partitioning the print-head chamber from the outlet chamber; and unloading the substrate from the outlet chamber.