| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for measuring the dimension of a structure suitable for miniaturization capable of performing measurement with high accuracy even when the dimension of a large object to be measured is measured using a long probe without complicating a device structure.SOLUTION: A dimension measuring device 100 includes: a mounting table 13 of an object W to be measured; probes 15A, 15B whose top ends of the arm parts are arranged with displacement detection parts 49A, 49B; a linear-movement mechanism 21 for moving the probe in a uniaxial direction; a tilt angle detection part for detecting a tilt angle made by an extending direction of the arm part of the probe and an orthogonal surface of the uniaxial direction; and a control part. The control part is input with information of the measurement distances outputted from the displacement detection parts and information of the tilt angle outputted from the tilt detection part in a state that the displacement detection part is brought into contact with the object to be measured. A positional deviation amount in the uniaxial direction generated by the tilt of the arm part at the arrangement position of the displacement detection part is obtained using the input tilt angle, and information of the distance after correcting the information of the measurement distance by the positional deviation amount is outputted. |
