| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal growing apparatus for adjusting the temperature of a single crystal body being pulled up, well in control in accordance with the growth of the single crystal body.SOLUTION: A single crystal growing apparatus comprises: a crucible to be charged with a single crystal material; an induction coil arranged around said crucible; a power source for causing said crucible to heat by feeding a high-frequency electric current to said induction coil; a pulling-up mechanism for moving up and down while holding a seed crystal, and for rising after bringing said seed crystal into contact with said single crystal material molten liquid in said crucible, thereby to pull up the single crystal continuing to said seed crystal; temperature measuring means for measuring the temperature of said single crystal being pulled up by said pulling-up mechanism; and control means connected with at least said power source and said temperature measuring means, characterized in that said control means adjusts the magnitude of said high-frequency current to be fed to said induction coil, on the basis of the temperature information of said single crystal body, which is measured by said temperature measuring means. |
