| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a crystal silicon solar battery that has a high conversion efficiency and whose light incident surface is processed precisely.SOLUTION: Provided is a method of manufacturing a crystal silicon solar battery produced by cutting into two or more a crystal silicon solar battery work in process that sequentially has, on a first principal surface side of a one conductivity type single crystal silicon substrate 2, a reverse conductivity type silicon-based thin-film layer 5 and a first transparent electrode layer 6 in this order, and that sequentially has, on a second principal surface side of the substrate, a one conductivity type silicon-based thin-film layer 8, a second transparent electrode layer 10, and a rear face electrode layer 11. The method includes a substrate cutting step of cutting the crystal silicon solar battery work in process into two or more after a first transparent electrode layer formation step and a rear face electrode layer formation step of forming the rear face electrode layer containing copper. The substrate cutting step includes a laser irradiation step of emitting laser light so as to expose at least a part of the substrate from the first principal surface side. |
