| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump that reduces vibrations to be transmitted to the outside and has high heat dissipation performance.SOLUTION: A rolling bearing 8 that pivotally supports a shaft 10 of a rotating body unit R is elastically supported by an elastic support body 14. The elastic support body 14 comprises an annular body 15 and a plurality of elastic parts 16 extended in an approximately circumferential direction from an outer peripheral surface of the annular body 15. Because the diameter of outer peripheral surfaces 16b1 of the elastic parts 16 is set so as to be slightly smaller than the diameter of an inner peripheral surface 41a of a concave part of an upper bearing housing 41, the outer peripheral surfaces 16b1 are opposed to the inner peripheral surface 41a, and they are not in contact with each other or they are partially in contact with each other even if they are in contact with each other. End parts 16c extended from one axial end of each of ends of the elastic parts 16 are slidably in contact with a lower surface 41b of the upper bearing housing 41 via surfaces 16c1 on the side of an inlet port due to a preload by which the rotating body unit R is pulled toward the side of the inlet port. |
