LIGHT IRRADIATION APPARATUS AND DRAWING APPARATUS

摘要

PROBLEM TO BE SOLVED: To easily produce an optical path length difference generation section.SOLUTION: A light irradiation apparatus 31 includes a light source section 4 for emitting a laser beam and an irradiation optical system 5 for guiding the laser beam to an irradiation surface 320 along an optical axis J1. The irradiation optical system 5 includes an optical path length difference generation section 61, a split lens section 62 and a condenser lens section 63. The optical path length difference generation section 61 includes a plurality of translucent parts having mutually different optical path lengths. The split lens section 62 includes a plurality of lenses for splitting incident light. The condenser lens section 63 overlaps irradiation regions 50 of beams from the plurality of lenses on the irradiation surface 320. An intermediate variable magnification section 64 is formed between the optical path length difference generation section 61 and the split lens section 62. Beams having passed through the plurality of translucent parts are made incident on the plurality of lenses respectively through the intermediate variable magnification section 64 constituting a reduction optical system. Consequently, the optical path length difference generation section 61 can be easily produced by forming the optical path length difference generation section 61 larger than the split lens section 62 in an array direction of the translucent parts.