发明名称 |
VACUUM EVAPORATION DEVICE, AND CRUCIBLE CARRY-IN/OUT MECHANISM AND CRUCIBLE CARRY-IN/OUT METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum evaporation device, and a crucible carry-in/out mechanism and crucible carry-in/out method that easily improve operation efficiency of an operation in carrying a crucible in and out of an evaporation source.SOLUTION: The present invention relates to a vacuum evaporation device that has an evaporation source including: a crucible which stores an evaporation material; heating means provided at a periphery of the crucible and heating the crucible; heat insulation means of preventing heat from leaking to the outside; a plurality of nozzles provided along a length of the crucible; and a housing which has an opening part on the side of the plurality of nozzles, and houses the crucible, heating means, and heat insulation means. The evaporation source has a retaining part for suppressing the crucible from shifting, and a retained part where the crucible is retained and a guide part which locates the crucible at a predetermined position in the housing when the crucible is carried in the evaporation source. |
申请公布号 |
JP2015190029(A) |
申请公布日期 |
2015.11.02 |
申请号 |
JP20140069640 |
申请日期 |
2014.03.28 |
申请人 |
HITACHI HIGH-TECH FINE SYSTEMS CORP |
发明人 |
MINEKAWA HIDEAKI;MATSUURA HIROYASU;MIYAKE TATSUYA;AKIBA YUJI |
分类号 |
C23C14/24;H01L51/50;H05B33/10 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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