| 摘要 |
PROBLEM TO BE SOLVED: To provide: a protector for a pickup device for a wafer with micro-protrusions, capable of easily and reliably replacing a porous sheet in contact with a wafer with micro-protrusions without damaging micro-protrusions of the wafer with micro-protrusions; and a pickup device for a wafer with micro-protrusions including the protector.SOLUTION: According to the present invention, there is provided a protector 1 for a pickup device for a wafer with micro-protrusions. The protector 1 includes: frame-shaped members 4 having an inner diameter of a size greater than the outer diameter of a pickup stage 16 of a pickup device 2; and a porous sheet 6 extended so as to cover the central space of the frame-shaped member. |
