| 摘要 |
The present invention relates to a bellows system comprising: a bellows which has a wrinkle structure to stretch, is formed with a hollow, and is used to isolate inside and outside; first and second flanges which are provided at both ends of the bellows, and are fixed to positions where both ends of the bellows are fixed to fix the bellows; and a first trap cover which is connected to the first flange, is installed in the bellows to be separated from the inside of the bellows, and is formed with a hollow. According to the present invention, by-products such as powder are prevented from being deposited or accumulated on the inside of the bellows in processing, so leakage is prevented from occurring due to damage of the bellows caused by deposition or the like of by-products. The by-products deposited or accumulated on the inside of the bellows are prevented from flying as particles and flowing into the chamber side, such particles are collected or are guided to move downward, so the occurrence of defects caused by the particles is reduced in the manufacturing process. It is possible to improve device operation rate by reducing the need for cleaning or the like caused by the particles. |
