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发明名称
离子植入方法以及离子植入装置
摘要
本发明提供一种控制离子照射量分布及每单位时间的离子照射量双方之技术。离子植入装置(10)具备:射束扫描器(26);射束计测部,能够测定晶圆位置上的射束扫描方向的离子照射量分布;及控制部(60),将用于往复扫描离子束之控制波形输出到射束扫描器(26)。控制部(60)包括:输出部,将基准控制波形输出到射束扫描器(26);获取部,从射束计测部(50)获取针对依据基准控制波形进行往复扫描之离子束而测定出之离子照射量分布;及生成部,利用所获取之离子照射量分布生成补正控制波形。控制部(60)输出被调整之补正控制波形,以使离子照射量分布成为目标分布且每单位时间的离子照射量分布成为目标值。
申请公布号
TW201541498
申请公布日期
2015.11.01
申请号
TW104109379
申请日期
2015.03.24
申请人
斯伊恩股份有限公司 SEN CORPORATION
发明人
黒瀬猛 KUROSE, TAKESHI;井门徳安 IDO, NORIYASU;狩谷宏行 KARIYA, HIROYUKI
分类号
H01J37/317(2006.01);H01L21/265(2006.01)
主分类号
H01J37/317(2006.01)
代理机构
代理人
林志刚
主权项
地址
日本 JP
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