反射镜的姿势调整构造、顶板开闭机构及检查装置;REFLECTING MIRROR POSTURE ADJUSTMENT STRUCTURE, CEILING PLATE OPENING AND CLOSING MECHANISM, AND INSPECTION DEVICE

摘要

一种反射镜的姿势调整构造、顶板开闭机构及检查装置，使能够构筑参照柱的反射镜的姿势调整构造实用化，谋求提高对保持于台上的对象物的描绘处理及/或检查的精度提高。由如下构件构成反射镜保持机构(10)：基部(11)，系一体地形成有固定在安装台(6a)上的固定部(110)、及具有窄宽度的狭缝形状的缺口部(113)、(113)、(115)的可动部(111)；反射镜保持架(12)，系保持反射镜(9)并固定于基部(11)的顶端；以及间隙宽度调整构件(13)，系调整基部(11)的缺口部(113)、(113)、(115)的间隙的宽度，藉由操作间隙宽度调整构件(13)来减小或增加缺口部(113)、(113)、(115)的间隙宽度，由此来调整保持于反射镜保持架(12)的反射镜(9)的倾斜程度。; a reflecting mirror holding frame (12) provided for holding and fixing a reflecting mirror (9) on a top of the base part (11); and a slit-width adjustment component (13) provided for adjusting a width of the slit of the notch part (113, 113, 115) of the base part (11). The slit-width adjustment component (13) is operated to decrease or increase the width of the slit of the notch part (113, 113, 115), so that a incline degree of the reflecting mirror (9) held on the reflecting mirror holding frame (12) is adjusted.