用于净化制程设备之废气的电浆反应器;PLASMA REACTOR FOR PURIFYING EXHAUST GAS OF THE PROCESS FACILITY

摘要

本发明提供一种电浆反应器系设置于一制程腔室与一真空泵之间，以分解自制程腔室中排出的废气，此电浆反应器包含：一管路系供废气流动；一电浆产生单元系设置在管路上，并产生电浆放电使废气分解；一壳体系环绕于管路周围，且在壳体与管路之外周围表面之间形成一分离空间；一侦测单元系侦测此管路或分离空间之环境状况；以及一控制器系自侦测单元接收环境状况之资讯，以决定此管路或分离空间之状态。;a plasma generation unit that is disposed on the conduit and causes plasma discharge so that the exhaust gas is decomposed; a housing which surrounds the conduit and in which a separation space is formed between the housing and an outer circumferential surface of the conduit; a detection unit that detects an environmental condition of the conduit or the separation space; anda controller that determines a state of the conduit or the separation space from information of the environmental condition received from the detection unit.