NOZZLE APPARATUS FOR VERTICAL TYPE PARYLENE MONOMER

摘要

The vertical parylene film deposition nozzle apparatus of the present invention has a reduced internal ventilating cross-section of a heating decomposition unit to make a dimer in a gas phase be rapidly pyrolyzed into a parylene monomer and supplied to a deposition chamber. The vertical parylene film deposition nozzle apparatus of the present invention can be made in a small size since the moving path of the gasified parylene dimer is increased.