发明名称 RADIATION-SENSITIVE RESIN COMPOSITION, RESIN FILM, AND ELECTRONIC COMPONENT
摘要 Provided is a radiation-sensitive resin composition that contains a binder resin (A), a radiation-sensitive compound (B), and a crosslinking agent (C) represented by the general formula (1), in which the amount of the crosslinking agent (C) contained is 3-25 parts by weight to 100 parts by weight of the binder resin (A). (In general formula (1), R1-R3 are each independently C1-10 hydrocarbon groups.)
申请公布号 WO2015163276(A1) 申请公布日期 2015.10.29
申请号 WO2015JP61969 申请日期 2015.04.20
申请人 ZEON CORPORATION 发明人 SHINDO, HIROAKI
分类号 G03F7/004;C08J5/18;C08K5/3475;C08K5/3492;C08L63/00;C08L101/00;G03F7/023 主分类号 G03F7/004
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