发明名称 MATERIAL SELECTIVE REGROWTH STRUCTURE AND METHOD
摘要 The disclosure relates to a method for creating a nanoscale structure. The method includes forming a window in a semiconductor structure, the semiconductor structure comprising a substrate, a first semiconductor layer, and a mask layer; depositing a second semiconductor layer within the window such that a gap remains between the second semiconductor and a portion of the window; and regrowing the first semiconductor layer such that the first semiconductor layer fills the gap.
申请公布号 WO2015163908(A1) 申请公布日期 2015.10.29
申请号 WO2014US35423 申请日期 2014.04.25
申请人 THE TEXAS STATE UNIVERSITY-SAN MARCOS 发明人 PINER, EDWIN L.
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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