发明名称 |
THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF, ARRAY SUBSTRATE AND DISPLAY DEVICE |
摘要 |
Disclosed are a thin film transistor and a manufacturing method thereof, an array substrate and a display device. The manufacturing method of the thin film transistor comprises: forming on a substrate (1) an induction layer thin film (3) and an oxide active layer thin film (4) coming into contact therewith, wherein the oxide active layer thin film (4) is located above or below the induction layer thin film (3); and heating the substrate (1) undergoing the above step, and crystallizing the oxide active layer thin film (4) through the induction effect of the induction layer thin film (3) to form a crystallized oxide active layer (5). |
申请公布号 |
WO2015161619(A1) |
申请公布日期 |
2015.10.29 |
申请号 |
WO2014CN86701 |
申请日期 |
2014.09.17 |
申请人 |
BOE TECHNOLOGY GROUP CO., LTD. |
发明人 |
WANG, DONGFANG;CHEN, JIANGBO |
分类号 |
H01L21/34;H01L29/786 |
主分类号 |
H01L21/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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