发明名称 ADSORPTION PAD FOR TRANSFER DEVICE AND TRANSFER DEVICE HAVING SAME
摘要 The present invention relates to an adsorption pad for a transfer device and, more particularly, to an adsorption pad for a transfer device, which transfers an object to be transferred to a stacking container, the adsorption pad comprising: a base plate; micro ciliary structures installed in a predetermined central area on the base plate while being spaced from each other by a predetermined interval and adsorbed to the object to be transferred; and a barrier installed in a predetermined peripheral area on the base plate and formed to surround the micro ciliary structures such that, among the micro ciliary structures, micro ciliary structures positioned adjacent to the peripheral area are prevented from being damaged.
申请公布号 WO2015163554(A1) 申请公布日期 2015.10.29
申请号 WO2014KR11390 申请日期 2014.11.26
申请人 UNIST ACADEMY-INDUSTRY RESEARCH CORPORATION;M PRECISION 发明人 JEONG, HOON EUI
分类号 H01L21/677;B23Q3/15;H02N13/00 主分类号 H01L21/677
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