发明名称 MANUFACTURING METHOD OF HEAT RADIATION MEMBER
摘要 <p>PROBLEM TO BE SOLVED: To provide a method for forming heat radiation fins without causing damage to a heat radiation member when the heat radiation member using a carbon nano-tube is manufactured.SOLUTION: A manufacturing method of a heat radiation member includes: a sheet formation step where a vertical orientation carbon nano-tube formed on a surface of a substrate is bent in a predetermined direction by a pressing tool and then the carbon nano-tube is separated from the substrate to obtain a carbon nano-tube sheet; a metal film formation step where a metal film M is formed on one surface of the carbon nano-tube sheet S obtained by the formation step; a protrusion part formation step where a pressing member 29 is pressed to the surface of the carbon nano-tube sheet, on which the metal film is formed by the metal film formation step, to form a protrusion part Sa having a V shaped cross section; and a fin formation step where a side surface of the protrusion part is pressed to crush the inner space part to form heat radiation fins F.</p>
申请公布号 JP2015188020(A) 申请公布日期 2015.10.29
申请号 JP20140064929 申请日期 2014.03.27
申请人 HITACHI ZOSEN CORP 发明人 INOUE TETSUYA;YAMASHITA TOMOYA;MARUYAMA HIROYUKI;IMASAKA SATOSHI
分类号 H01L23/373 主分类号 H01L23/373
代理机构 代理人
主权项
地址