MEMS Swtich with Internal Conductive Path

摘要

A MEMS switch has a base formed from a substrate with a top surface and an insulator layer formed on at least a portion of the top surface. Bonding material secures a cap to the base to form an interior chamber. The cap effectively forms an exterior region of the base that is exterior to the interior chamber. The MEMS switch also has a movable member (in the interior chamber) having a member contact portion, an internal contact (also in the interior chamber), and an exterior contact at the exterior region of the base. The contact portion of the movable member is configured to alternatively contact the interior contact. A conductor at least partially within the insulator layer electrically connects the interior contact and the exterior contact. The conductor is spaced from and electrically isolated from the bonding material securing the cap to the base.

主权项

1. A MEMS switch comprising:
a substrate having a top surface; an insulator layer formed on at least a portion of the top surface of the substrate, the insulator and substrate forming a base; a cap; bonding material securing the cap to the base to form an interior chamber, the cap forming an exterior region of the base that is exterior to the interior chamber; a movable member having a member contact portion; an interior contact, the member contact portion being configured to alternatively contact the interior contact, the movable member and interior contact being within the interior chamber; an exterior contact at the exterior region of the base; and a conductor at least partially within the insulator layer, the conductor electrically connecting the interior contact and the exterior contact, the conductor being spaced from and electrically isolated from the bonding material securing the cap to the base.