TEST JIG, SUBSTRATE TEST APPARATUS AND SUBSTRATE TEST METHOD

摘要

The present invention provides a test jig and a substrate test apparatus having the same, capable of reducing calibration time for a capacitance measurement unit. The test jig (3) is detachably disposed on a test apparatus main body (2) to test a substrate (100), and comprises: a probe (Pr) to come into contact with a test point formed on the substrate (100); a connection terminal (36) to electrically connect the probe (Pr) to the test apparatus main body (2); a reference capacitor (C1) having a prescribed reference capacitance; and a connection terminal (37) to electrically connect the reference capacitor (C1) to a capacitance measurement circuit (45).