| 摘要 |
PROBLEM TO BE SOLVED: To develop an inkjet head that has an excellent yielding percentage.SOLUTION: The inkjet head includes: a substrate having a first surface, a second surface located on the opposite side of the first surface and a cylindrical hole that communicates the first surface with the second surface; and a nozzle plate having a vibration plate that is laminated on the first surface of the substrate, blocks one end of the hole to form a pressure chamber and has a nozzle communicating with the pressure chamber, and a driving element that changes the capacity of the pressure chamber by deforming the vibration plate when being applied with a voltage. A resist mask is provided at the second surface of the substrate to form the pressure chamber by etching. |
