| 发明名称 |
SMOOTH SEED LAYERS WITH UNIFORM CRYSTALLINE TEXTURE FOR HIGH PERPENDICULAR MAGNETIC ANISOTROPY MATERIALS |
| 摘要 |
A method for fabricating a perpendicular magnetic tunnel junction (pMTJ) device includes growing a seed layer on a first electrode of the pMTJ device. The seed layer has a uniform predetermined crystal orientation along a growth axis. The method also includes planarizing the seed layer while maintaining the uniform predetermined crystal orientation of the seed layer. |
| 申请公布号 |
US2015311427(A1) |
申请公布日期 |
2015.10.29 |
| 申请号 |
US201414334015 |
申请日期 |
2014.07.17 |
| 申请人 |
QUALCOMM Incorporated |
发明人 |
GOTTWALD Matthias Georg;KAN Jimmy;LEE Kangho;PARK Chando;KANG Seung Hyuk |
| 分类号 |
H01L43/02;H01L43/12 |
主分类号 |
H01L43/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of fabricating a perpendicular magnetic tunnel junction (pMTJ) device, comprising:
growing a seed layer on a first electrode of the pMTJ device, the seed layer having a uniform predetermined crystal orientation at least along a growth axis; and planarizing the seed layer while maintaining the uniform predetermined crystal orientation of the seed layer. |
| 地址 |
San Diego CA US |
