SUSPENDED SUPERCONDUCTING QUBITS

摘要

A qubit system includes a substrate layer, a qubit circuit suspended above the substrate layer and fine structure disposed between the qubit circuit and the substrate layer.

主权项

1. A method of fabricating a qubit system, the method comprising:
forming a qubit circuit on a substrate; and undercutting the substrate such that a fine structure remains suspending the qubit circuit above remaining substrate.