TRANSPARENT CONDUCTIVE GLASS SUBSTRATE WITH SURFACE ELECTRODE, METHOD FOR PRODUCING SAME, THIN FILM SOLAR CELL, AND METHOD FOR MANUFACTURING THIN FILM SOLAR CELL

摘要

The present invention provides a transparent conductive glass substrate with a surface electrode having a low reflectivity, a low absorption, and a high transmittance, and provides a thin film solar cell including the surface electrode and having a higher photoelectric conversion efficiency than that of the prior arts. The transparent conductive glass substrate with the surface electrode is obtained in such a way that, on a translucent glass substrate, a low-refractive-index transparent thin film having a refractive index of 1.6 to 1.8 at a wavelength of 550 nm and a film thickness of 50 nm to 150 nm is formed as a first layer, and, on the low-refractive-index transparent thin film, an amorphous indium-oxide-based transparent conductive film as a second layer and a rough film made of a crystalline zinc-oxide-based transparent conductive film as a third layer are formed in that order.

主权项

1. A transparent conductive glass substrate with a surface electrode, wherein, on a translucent glass substrate, a low-refractive-index transparent thin film having a refractive index of 1.6 to 1.8 at a wavelength of 550 nm and having a film thickness of 50 nm to 150 nm is formed as a first layer, and an amorphous indium-oxide-based transparent conductive film as a second layer and a rough film made of a crystalline zinc-oxide-based transparent conductive film as a third layer are formed in that order on the low-refractive-index transparent thin film.