SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THE SAME

摘要

A semiconductor device includes a single crystalline substrate, an electrical element and an optical element. The electrical element is disposed on the single crystalline substrate. The electrical element includes a gate electrode extending in a crystal orientation <110> and source and drain regions adjacent to the gate electrode. The source region and the drain region are arranged in a direction substantially perpendicular to a direction in which the gate electrode extends. The optical element is disposed on the single crystalline substrate. The optical element includes an optical waveguide extending in a crystal orientation <010>.

主权项

1. A method of manufacturing a semiconductor device, comprising:
forming an optical element on a single crystalline substrate, the optical element comprising an optical waveguide extending in a crystal orientation <010>; and forming an electrical element comprising a gate electrode extending in a crystal orientation <110>, and source and drain regions adjacent to the gate electrode, the source and drain regions arranged in a direction substantially perpendicular to a direction in which the gate electrode extends.