| 摘要 |
An apparatus for noncontact sensing of a voltage response characteristic and/or maximum open-circuit voltage (MOCV) of photovoltaic semiconductor specimens includes a high intensity wide spectrum light source adapted to emit light through a conductive probe tip; the conductive probe tip is situated in spatial relationship with a vacuum chuck to form a capacitive specimen wafer interrogation space upon which specimen wafers are located; the high intensity light source emits light through the conductive probe tip, said light impinges a specimen wafer located within the interrogation space, and voltage response across the probe tip, wafer interrogation space, and vacuum chuck is amplified and recorded. |
