| 发明名称 |
MEMS Switch |
| 摘要 |
Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off. |
| 申请公布号 |
US2015311003(A1) |
申请公布日期 |
2015.10.29 |
| 申请号 |
US201414262188 |
申请日期 |
2014.04.25 |
| 申请人 |
Analog Devices Global |
发明人 |
Fitzgerald Padraig L.;Wong Jo-ey;Goggin Raymond C.;Stenson Bernard P.;Lambkin Paul;Schirmer Mark |
| 分类号 |
H01H1/00;B81B3/00;H01H59/00 |
主分类号 |
H01H1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS component, comprising:
a substrate; a support; a movable structure; a control electrode; and the support extends from the substrate and holds a portion of the movable structure adjacent the substrate, and the movable structure overlaps with the control electrode, wherein the movable structure is delimited by an edge, and the control electrode extends past the edge of the movable structure. |
| 地址 |
Hamilton BM |
