发明名称 DEVICE FOR PROVIDING DEPOSITION MATERIAL AND DEPOSITION APPARATUS INCLUDING THE SAME
摘要 The present invention provides a device to supply a depositing material and an apparatus to deposit having the same comprising: a crucible which heats and evaporates a depositing material; a distribution pipe which forms an inlet communicated with the crucible on one side, and a plurality of injection holes to inject the depositing material evaporated from the crucible on a substrate on an other side; and a plurality of nozzles which are respectively coupled to the plurality of injection holes formed in the distribution pipe, changing an injecting direction of the depositing material to be injected on the substrate.
申请公布号 KR20150121453(A) 申请公布日期 2015.10.29
申请号 KR20140047312 申请日期 2014.04.21
申请人 LG ELECTRONICS INC. 发明人 KIM, SUN KEE;LEE, SEUNG JIN;MOON, YANG SIK;LEE, JOO WON
分类号 C23C14/22;H01L21/203;H01L51/50;H05B33/10 主分类号 C23C14/22
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