VACUUM PROCESSING SYSTEM, VACUUM PROCESSING DEVICE, LUBRICATING AGENT SUPPLY DEVICE, AND LUBRICATING AGENT SUPPLYING METHOD

摘要

A transport system is a vacuum processing system that includes a transport device that is provided in a vacuum, and a lubricating agent supply device that supplies lubricating agent to the transport device and provided in the ambient atmosphere. The transport device has a lubricating agent flow channel that is a channel for grease injected to a site subject to lubrication. The lubricating agent supply device has a grease server that stores a lubricating agent in the ambient atmosphere, a lubricating agent supply pipe which is a channel that guides the grease stored in the grease server to the lubricating agent flow channel and that connects the grease server and the lubricating agent flow channel, and an exhaust pump that exhausts the inside of the lubricating agent supply pipe.

主权项

1. A vacuum processing system comprising:
at least one vacuum processing device provided in a vacuum, and a lubricating agent supply device that supplies lubricating agent to the vacuum processing device and is provided in the ambient atmosphere; wherein
the vacuum processing device has a lubricating agent flow channel that is a channel for lubricating agent that is injected to a site subject to lubrication;the lubricating agent supply device comprising:a lubricating agent storage part that stores the lubricating agent in the ambient atmosphere;a lubricating agent supply channel that is connected to the lubricating agent storage part and the lubricating agent flow channel, and is a channel that guides the lubricating agent that is stored in the lubricating agent storage part to the lubricating agent flow channel; andan exhausting part that exhausts inside the lubricating agent supply channel.