METHOD FOR FABRICATING ULTRA-LOW DENSITY THREE-DIMENSIONAL THIN FILM STRUCTURE BASED ON PHOTO-LITHOGRAPHY

摘要

A method for forming an ultra-low density three-dimensional thin film structure made of a solid thin film, including: radiating ultraviolet rays of different patterns in respective predetermined directions to a liquid photosensitive resin bulk so as to harden a portion of the resin bulk; removing the liquid photosensitive resin which is not hardened so as to form a solid photosensitive resin structure; coating the surface of the solid photosensitive resin structure with a thin film; removing the thin film from the outermost surface of the resin bulk so as to expose the solid photosensitive resin; and removing the solid photosensitive resin structure.

主权项

1. A method for forming an ultra-low density three-dimensional thin film structure made of a solid thin film, the method comprising the steps of:
radiating ultraviolet rays of different patterns in respective predetermined directions to a liquid photosensitive resin bulk so as to harden a portion of the resin bulk; removing the liquid photosensitive resin which is not hardened so as to form a solid photosensitive resin structure; coating the surface of the solid photosensitive resin structure with a thin film; removing the thin film from an outermost surface of the resin bulk so as to expose the solid photosensitive resin; and removing the solid photosensitive resin structure, wherein each of the different patterns has a structure in which predetermined polygonal shapes are arranged in the vicinity of and alternately with each other, the solid photosensitive resin structure has a structure in which a plurality of prisms intersects with each other, the ultra-low density three-dimensional thin film structure made of a solid thin film has a structure in which hollow polyhedron unit cells having surfaces with a flat surface element are interconnected and repeatedly formed, thus enabling the ultra-low density three-dimensional thin film structure to be formed into an engraved structure relative to the solid photosensitive resin structure.