| 发明名称 |
ANTIREFLECTIVE COATING COMPOSITIONS AND PROCESSES THEREOF |
| 摘要 |
The present invention relates to a novel absorbing antireflective coating composition comprising a novel crosslinkable polymer comprising at least one repeat unit (A) having structure (1), at least one repeat unit (B) having a structure (2), and at least one repeat unit (C) having structure (3);;where D is a direct valence bound or C(R1)(R2) methylene moiety where R1 and R2 are independently H, C1-C5 alkyl, C3-C24 cycloalkyl or C6-C24 aryl; Ari, Arii, Ariii and Ariv are independently phenylenic and naphthalenic moiety, R3 and R4 are independently hydrogen or C1-C8 alkyl; and R5 and R6 are independently hydrogen or C1-C8 alkyl; and a solvent. The invention also relates to a process for forming an image using the novel antireflective coating composition. |
| 申请公布号 |
US2015309410(A1) |
申请公布日期 |
2015.10.29 |
| 申请号 |
US201414295656 |
申请日期 |
2014.06.04 |
| 申请人 |
AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L. |
发明人 |
RAHMAN M. Dalil;KUDO Takanori;DIOSES Alberto D.;MCKENZIE Douglas;ANYADIEGWU Clement;PADMANABAN Munirathna;MULLEN Salem K. |
| 分类号 |
G03F7/09;G03F7/16;C09D165/00 |
主分类号 |
G03F7/09 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An antireflective coating composition comprising
i) a crosslinkable polymer comprising at least one repeat unit (A) having structure (1), at least one repeat unit (B) having a structure (2), and at least one repeat unit (C) having structure (3)where D is a direct valence bound or a C(R1)(R2) methylene moiety where R1 and R2 are independently H, C1-C8 alkyl, C3-C24 cycloalkyl or C6-C24 aryl; Ari, Arii, Ariii and Ariv are independently phenylenic or naphthalenic moiety, R3 and R4 are independently hydrogen, C1-C8 alkyl or C1-C8 alkoxy; R5 and R6 are independently hydrogen C1-C8 alkyl or C1-C8 alkoxy; and,
ii) a solvent. |
| 地址 |
SOMERVILLE NJ US |
