发明名称 COATING LIQUID FOR FORMING METAL OXIDE FILM, METAL OXIDE FILM, FIELD-EFFECT TRANSISTOR, AND METHOD FOR PRODUCING FIELD-EFFECT TRANSISTOR
摘要 To provide a coating liquid for forming a metal oxide film, containing: an indium compound; at least one selected from the group consisting of a magnesium compound, a calcium compound, a strontium compound, and a barium compound; at least one selected from the group consisting of a compound containing a metal a maximum positive value of an oxidation number of which is IV, a compound containing a metal a maximum positive value of an oxidation number of which is V, and a compound containing a metal a maximum positive value of an oxidation number of which is VI; and an organic solvent.
申请公布号 SG11201507942P(A) 申请公布日期 2015.10.29
申请号 SG11201507942P 申请日期 2014.03.26
申请人 RICOH COMPANY, LTD. 发明人 NAKAMURA, YUKI;UEDA, NAOYUKI;MATSUMOTO, SHINJI;TAKADA, MIKIKO;SONE, YUJI;SAOTOME, RYOICHI;ARAE, SADANORI;ABE, YUKIKO
分类号 H01L21/368;C09D1/00;H01L29/786 主分类号 H01L21/368
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