EPITAXIAL STRUCTURE AND MANUFACTURING METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an epitaxial structure and a manufacturing method of the epitaxial structure.SOLUTION: A manufacturing method of a light emitting diode of the invention includes: a first step where a carbon nanotube film is provided; a second step where defects are formed on surfaces of carbon nanotubes; a third step where a nano material layer is grown on the surfaces of the carbon nanotubes; a fourth step where the carbon nanotube film is removed to form an inorganic insulation nanotube film; a fifth step where the inorganic insulation nanotube film is set on a growth surface of a substrate; and a sixth step where an epitaxial structure layer is grown on the growth surface of the substrate.