MICROELECTROMECHANICAL GYROSCOPE WITH OPEN LOOP READING DEVICE AND CONTROL METHOD

摘要

A microelectromechanical gyroscope that includes a first mass oscillatable according to a first axis; an inertial sensor, including a second mass, drawn along by the first mass and constrained so as to oscillate according to a second axis, in response to a rotation of the gyroscope; a driving device coupled to the first mass so as to form a feedback control loop and configured to maintain the first mass in oscillation at a resonance frequency; and an open-loop reading device coupled to the inertial sensor for detecting displacements of the second mass according to the second axis. The driving device includes a read signal generator for supplying to the inertial sensor at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency.

主权项

1. A device, comprising:
a first mass; a second mass coupled to the first mass to oscillate in response to the first mass; a driving circuit coupled to the first mass to form a feedback control loop and to maintain the first mass in oscillation at a resonance frequency; a reading circuit coupled to the second mass to detect displacements of the second mass; and a read signal generator structured to supply to the second mass at least one read signal that varies with the resonance frequency.