Abrasive Regeneration Method

摘要

Technique to provide an abrasive regeneration method which, from a used abrasive, can recover an abrasive by an efficient method and can thereafter obtain a high-purity regenerated abrasive by a simple method. This abrasive regeneration method uses an abrasive comprising at least one type of abrasive selected from diamond, boron nitride, silicon carbide, alumina, alumina zirconia, zirconium oxide and cerium oxide. The abrasive regeneration involves a slurry recovery step (A) for recovering an abrasive slurry discharged from a polishing machine, a separation and concentration step (B) for adding an alkaline earth metal salt as an inorganic salt to the recovered abrasive slurry to aggregate the abrasive, and separating and concentrating the abrasive from a mother liquor, an abrasive recovery step (C) for recovering the separated and concentrated abrasive, and a second concentration step (D) for filter-treating the concentrated abrasive.

主权项

1. A method for regenerating an abrasive from a used abrasive-containing slurry, the method comprising:
(A) collecting an abrasive-containing slurry discharged from an abrasive device; (B) separating the abrasive from a mother liquid and conducting a primary concentration of the abrasive by adding a metal salt including an alkali earth metal as an inorganic salt to the collected abrasive-containing slurry and aggregating the abrasive; (C) collecting the abrasive which was separated and concentrated by the primary concentration; and (D) conducting a secondary concentration of the abrasive which was concentrated in the primary concentration and collected by filtration, wherein the abrasive is at least one selected from a group consisting of diamond, boron nitride, silicon carbide, alumina, alumina-zirconia, zirconium oxide and cerium oxide.