RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL

摘要

A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.

主权项

1. A method of reducing flow of sweep gas through an interior volume of a ventilated gas cabinet arranged to contain a gas supply system including gas supply vessel(s), said method comprising using physical adsorbent-based gas storage and dispensing vessel(s) as said gas supply vessel(s), and reducing flow of sweep gas through said interior volume, in relation to flow of sweep gas through said interior volume when the gas cabinet contains gas supply vessel(s) that are not physical adsorbent-based, wherein the physical adsorbent-based gas storage and dispensing vessel(s) comprise a valve head coupled with an automatic valve actuator, wherein the automatic valve actuator is operable to open a valve in the valve head to dispense gas from the gas supply vessel(s), and wherein the physical adsorbent comprises a multiplicity of monolithic carbon adsorbent articles of cylindrical form, abutting one another in face-to-face contact at circular cross-section end surfaces thereof.