| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a sample-holding tool improved in the thermal evenness in a sample-holding face.SOLUTION: A sample-holding tool 10 of the present invention comprises: a ceramic base 1 having a sample-holding face 11 in its outer surface; and an electrode 2 provided in the base 1 for electrostatic attraction. The base 1 includes aluminum nitride as a primary component, and 8-16 mass% of cerium. In X-ray diffraction, the diffraction intensity ratio B/A is 0.35 or less, where A represents a diffraction intensity coming from (100)-plane of the aluminum nitride, and B represents a diffraction intensity originating from (101)-plane of aluminum cerium trioxide. Thus, the dielectric loss of the base 1 can be reduced.</p> |
