PRECISION ACTUATING DEVICE

摘要

Disclosed is a precision actuating device, which is used for realizing a precision actuation on at least two directions, comprising: a first moving component (10), having an installation space (101) formed therein, wherein the first moving component (10) has an upper surface (102) and an inner side surface (103), the installation space (101) is recessed from the upper surface (102) into the interior of the first moving component (10) and is open towards the upper surface (102), and the periphery of the installation space (101) is defined by the inner side surface (103); a first precision driving mechanism (11), which is connected to the first moving component (10) in a transmissive manner, wherein the first precision driving mechanism (11) is used for moving the first moving component (10) in a first direction; and a second moving component (20) and a second precision driving mechanism (21), arranged and held in the installation space (101) so as to be able to move along with the first moving component (10) in the first direction, wherein the second precision driving mechanism (21) is connected to the second moving component (20) in a transmissive manner and is used for moving the second moving component (20) in the installation space (101) in a second direction different from the first direction. The precision actuating device has a compact structural design, a small occupied volume, and a large moving range.