| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a laser processing device which can easily eliminate deviation of the average power of a pulse laser beam output to two processing routes.SOLUTION: An acoustic optical element outputs a laser beam output from a laser source to one of a first processing route and a second processing route. A first measuring instrument measures a power or energy of the laser beam output to the first processing route. A second measuring instrument measures a power or energy of the laser beam output to the second processing route. An attitude adjustment mechanism changes an attitude of the acoustic optical element so as to change an angle of incidence of the laser beam to the acoustic optical element. A control device controls the attitude adjustment mechanism based on measurement results of the first measuring instrument and the second measuring instrument, and instructs the acoustic optical element about the route to which the laser beam is output, out of the first processing route and the second processing route.</p> |
