AUTOFOCUS METHOD FOR MICROSCOPE AND MICROSCOPE COMPRISING AUTOFOCUS DEVICE

摘要

A microscope including an objective having a focal plane in a sample space, and an autofocus device comprising a light modulator for generating a luminous modulation object that is intensity-modulated periodically along one direction, an autofocus illumination optical unit that images the modulation object such that its image arises in the sample space, an autofocus camera, an autofocus imaging optical unit that images the image of the modulation object in the sample space onto the autofocus camera, a control device, which receives signals of the autofocus camera and determines an intensity distribution of the image of the modulation object and generates a focus control signal therefrom. The control device determines an intensity distribution of the image of a luminous comparison object imaged by the optical unit to correct the intensity distribution of the image of the modulation object with regard to reflectivity variations in the sample space.

主权项

1. A microscope with an objective, which has a focal plane lying in a sample space, and an autofocus device having:
a light modulator which is designed for generating a luminous modulation object that is intensity-modulated periodically along one direction, an autofocus illumination optical unit which images the modulation object such that an image of the modulation object forms in the sample space, an autofocus camera, an autofocus imaging optical unit which images the image of the modulation object formed in the sample space onto the autofocus camera, and a control device which receives signals of the autofocus camera and is designed to determine an intensity distribution of the image of the modulation object and to generate a focus control signal therefrom, wherein the light modulator additionally generates a luminous comparison object which extends along the direction of the modulation object, the autofocus illumination optical unit also images the comparison object such that an image of the comparison object forms in the sample space, the autofocus imaging optical unit also images the image of the comparison object formed in the sample space onto the autofocus camera, and the control device is designed to determine from the signals of the autofocus camera an intensity distribution of the image of the comparison object along the direction and thereby to correct the intensity distribution of the image of the modulation object with regard to reflectivity variations in the sample space.