发明名称 METHOD AND DEVICE FOR EMBOSSING A NANOSTRUCTURE
摘要 The present invention relates to a method for embossing a nanostructure (13) from a nanostructure stamp (5) into a stamp face (14) of a curable material (8) applied on a substrate (7) with the following steps, in particular in the following sequence: aligning the nanostructure (13) with respect to the stamp face (14), embossing the stamp face (14) by A) preloading the nanostructure stamp (5) by deforming the nanostructure stamp (5) and/or preloading the substrate (7) by deforming the substrate (7), B) contacting a partial area (15) of the stamp face (14) with the nanostructure stamp (5), and C) automatic contacting of the remaining area (16) at least partially, in particular predominantly, by the preloading of the nanostructure stamp (5) and/or the preloading of the substrate (7).
申请公布号 WO2015161868(A1) 申请公布日期 2015.10.29
申请号 WO2014EP58141 申请日期 2014.04.22
申请人 EV GROUP E. THALLNER GMBH 发明人 KREINDL, GERALD
分类号 G03F7/00 主分类号 G03F7/00
代理机构 代理人
主权项
地址