发明名称 GRAPHENE MANUFACTURING METHOD AND GRAPHENE ATOMIC LAYER ETCHING OF GRAPHENE MANUFACTURING METHOD AND WAFER COMBINATION METHOD OF GRAPHENE BENDNG TRANSISTOR AND GRAPHENE BENDNG TRANSISTOR
摘要 Provided in the present invention is a method for manufacturing a low temperature direct growth graphene directly growing on a substrate at low temperature. Also, provided in the present invention is a method for manufacturing of a single layer or multilayer graphene. And, provided in the present invention is a multilayer graphene directly growing on a substrate. Provided in the present invention are a single layer graphene uniformly distributed on the upper part of a carbon dissolved layer, and a method for manufacturing graphene having a graphene atomic layer etched. Also, provided in the present invention is a graphene bending transistor manufactured by a method including method 1) to 3): 1) a face to face coupling method between a graphene bending circuit wafer including graphene and a circuit connected to the graphene and a threshold control circuit (CMOS wafer) controlling a graphene bending circuit wafer; 2) a face to face coupling method between graphene bending circuit wafer including a graphene and a circuit connected to the graphene and a threshold control circuit and a CMOS wafer; and 3) a face to face coupling method between a graphene bending circuit wafer including a graphene and a circuit connected to the graphene and a CMOS wafer, and then a manufacturing method preparing a threshold control circuit or a threshold control circuit and a CMOS circuit and/or a device, a transistor, etc.
申请公布号 KR20150121684(A) 申请公布日期 2015.10.29
申请号 KR20150095633 申请日期 2015.07.05
申请人 LEE, YOUN TEK 发明人 LEE, YOUN TEK
分类号 C01B31/04 主分类号 C01B31/04
代理机构 代理人
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